VUM-3416  Wafer Backside Cleaner

Loosens and wipes away depositions

In manufacturing processes of semiconductors, traces of obstructive substances may occasionally be left on the backside of wafers.  Using Ultra violet rays and N2 below, VUM-3416 loosens and wipes away such depositions.  The machine can be slit into a main body and a conveying system and can be incorporated in an existing line to increase yields.

VUU-3375  MK Asher

Cleans metal molds

The AK Asher cleans metal molds by irradiating ultraviolet rays from special mercury vapor lamps.  While the mold press is at rest, the MK Asher, operated for about a half hour, decomposes depositions (organic substances) on the mold surfaces.  This facilitates subsequent work of mold cleaning.  Minimizing losses of working time, it greatly increase work efficiency.

MEM-5296  Wafer Inspection System

Inspects bumps (locations and heights)

MEM-5296 can non-contact measure three-dimensional features such as locations and heights of swells such as bumps formed on the surfaces of semiconscious wafers.

VUM-3434  UV Yield Innovator

Eliminates electrostatics by UV rays

The yield innovator is a unit to increase yield by reforming the surfaces of semiconductor wafers with a certain energy of short-wave ultraviolet rays on them